An Investigation of the Plasma Composition in Plasma-enhanced Hot Filament Catalytic Chemical Vapor Deposition of Carbon Nanotubes

Synthesis of Carbon Nanotubes by Plasma Enhanced Hot-Filament C

A mixture of acetylene, hydrogen and ammonia C2H2/H2/NH3 is used to produce carbon nanotubes (CNTs) by a plasma-enhanced catalytic chemical vapor deposition process with hot-filaments assistance (PE HF CCVD). The investigation of gas phase and surface chemistry is performed by CHEMKINTM software. The concentration of gas phase species on the substrate is presented. Based on this study the role ...

On the role of activation mode in the plasma- and hot filaments- enhanced catalytic chemical vapour deposition of vertically aligned carbon nanotubes

515 (2006) 53 – 58 DOI: http://dx.doi.org/10.1016/j.tsf.2005.12.137 On the role of activation mode in the plasmaand hot filamentsenhanced catalytic chemical vapour deposition of vertically aligned carbon nanotubes C.S. Cojocaru , F. Le Normand Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, Bâ t 69, 23, rue du Loess, 67034 Strasbourg Cedex, France 1 Present address: Laboratoire de P...

Effect of Temperature and Gas Flux on the Mechanical Behavior of TiC Coating by Pulsed DC Plasma Enhanced Chemical Vapor Deposition(TECHNICAL NOTE)

  There are many factors such as voltages, duty cycle, pressure, temperatures and gas flux in coatings process that were effective in changing coatings characteristic. In this paper in plasma enhanced chemical vapor deposition (PECVD) technique, temperature and gas flux are two important variants that affecting the coatings structure and mechanical properties. All TiC coating deposited on a hot...

Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition

In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refra...

Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures